Trichlorosilane TCS Silicochloroform Industrial Grade Trichlorosilane Trichlorosilane manufacturers Trichlorosilane 99% / 99.9%
| Product Name | Trichlorosilane SiHCl 3 |
| Synonyms | Trichlorosilane, Silicochloroform |
| CAS No. | 10025-78-2 |
| UN Number | UN 1295 |
| Risk Terms | Pyrophoric in air, Highly explosive, Harmful if inhaled |
| Explosion Range | 1.2% - 90.5% |
Safety Warning: Trichlorosilane is a pyrophoric gas; professional protective measures are mandatory during operation.
| Trichlorosilane (SiHCl 3) Quality Standards | ||||
|---|---|---|---|---|
| Category | Test Item | Unit | Indicator | Method |
| Composition | SiHCl 3 | Vol% | ≥99.5 | — |
| DCS | Vol% | ≤0.20 | GC | |
| STC | Vol% | ≤0.20 | GC | |
| Polymers | Vol% | ≤0.10 | GC | |
| Metal Ions | Al | ppb | ≤100 | ICP |
| P | ppb | ≤30 | ICP | |
| Fe+Cr+Cu+Zn | ppb | ≤300 | ICP | |
| B+Ga+In | ppb | ≤100 | ICP | |
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