Electronic grade Dichlorosilane（DCS）Dichlorosilicon DCS gas SiH2Cl2 supplier
| Product Name | Dichlorosilane SiH 2Cl 2 |
| Aliases | DCS, Dichlorosilylene |
| CAS No. | 4109-96-0 |
| UN Number | UN 2189 2.3 |
| Hazard Terms | Extremely Flammable, Reacts with Water, Toxic if Inhaled |
| Explosion Limits | 4.1% - 99% |
SAFETY WARNING: Dichlorosilane is an extremely flammable gas. Professional protective measures must be equipped during operation.
| Dichlorosilane (DCS) Product Standards | |||
|---|---|---|---|
| Item | Unit | Indicator | Method |
| 1. Component Requirements | |||
| SiH 2Cl 2 | Vol% | ≥99.99 | — |
| STC (SiCl 4) | ppm (v/v) | ≤25 | GC |
| TCS (SiHCl 3) | ppm (v/v) | ≤10 | GC |
| MCS + HCl | ppm (v/v) | ≤50 | GC |
| N 2 / O 2+Ar / CO | ppm (v/v) | ≤1 | GC |
| H 2 | ppm (v/v) | ≤10 | GC |
| CO 2 | ppm (v/v) | ≤1 | FT-IR |
| CH 4 | ppm (v/v) | ≤1 | ICP-MS |
| 2. Metal Ion Testing (ppb) | |||
| B + Al | ppb | ≤0.10 | ICP-MS |
| P + As | ppb | ≤0.30 | ICP-MS |
| Fe | ppb | ≤5.00 | ICP-MS |
| Ca / Cr / K / Ni | ppb | ≤1.00 | ICP-MS |
| Na / Mn / Cu | ppb | ≤0.20 | ICP-MS |
| Ga / Sb / In / Mo / Zn | ppb | ≤0.10 | ICP-MS |
| Cd / Co | ppb | ≤0.50 | ICP-MS |
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