Chlorosilane Gas Monochlorosilane（MCS）SiH3Cl Electronic grade chlorosilane
| Product Name | Monochlorosilane SiH 3Cl |
| Alias | Chlorosilane, Silyl Chloride |
| CAS Number | 13465-78-6 |
| UN Number | UN 2988 4.3 |
| Risk Term | Flammable |
| Explosive Limits | 1.75% - 48.5% |
Safety Warning: Extremely flammable gas; professional protective measures must be implemented during operation.
| Xingtai Silicon Materials — Monochlorosilane (MCS/SiH 3Cl) Product Standard | ||||
|---|---|---|---|---|
| Category | Item | Unit | Spec | Method |
| Composition Requirements | SiH 3Cl | Vol% | ≥99.9 | GC |
| DCS | Vol% | ≤0.05 | GC | |
| TCS | Vol% | ≤0.025 | GC | |
| STC | Vol% | ≤0.025 | GC | |
| CO | ppm | ≤1.0 | GC | |
| CO 2 | ppm | ≤1.0 | GC | |
| N 2 | ppm | ≤1.0 | GC | |
| O 2+Ar | ppm | ≤1.0 | GC | |
| Metal Ion Analysis | Boron (B) | ppb | ≤5.0 | ICP-MS |
| Phosphorus (P) | ppb | ≤5.0 | ICP-MS | |
| Arsenic (As) | ppb | ≤5.0 | ICP-MS | |
| Aluminum (Al) | ppb | ≤5.0 | ICP-MS | |
| Chromium (Cr) | ppb | ≤5.0 | ICP-MS | |
| Iron (Fe) | ppb | ≤5.0 | ICP-MS | |
| Nickel (Ni) | ppb | ≤5.0 | ICP-MS | |
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